• Scan area 110 µm x 110 µm
• Max vertical depth 22µm
• Optical top and side view of the cantilever
• Contact mode and Non contact dynamic mode
• Dynamic frequency range 15-300kHz
• Micro scratch + Microindentation
• Max Load : 30N
• Max Friction Load : 30N
• Max penetration depth : 1mm
• Max scratch length : 4mm
• Tips :
- Sphere 100µm (scratch)
- Vickers (indentation)
Tensile-compression in-situ device in SEM
• load cell 2000N & 5000N
• sample size: 29x27x5mm (LxBxH)
• Tmax=500°C