Aiming at the local electrical characterisation of materials, an AFM apparatus (NanoObserver) dedicated to functional characterisations has been purchased recently (CEMAM funding). Besides the standard modes, several options are available: ResiScope-compatibility, PFM, HD-KFM, Environmental control kit,…
Enhanced nanoindentation: In-situ SEM and electrically-functionalised nanoindenter
In order to support the rising demand for innovative materials optimising functional and structural properties at small scales, an original multifunctional characterization tool has been developed. A commercial nanoindenter has been functionalised for electrical characterisations and integrated into an SEM (on the CMTC platform). This characterisation coupling allows real-time resistive-, capacitive- and piezoelectric measurements during fine mechanical testing. This instrument development has been funded by CEMAM.
Resistive-nanoindentation technique has been successfully applied to the continuous monitoring of the effective indentation contact area which is crucial for the quantitative computation of mechanical properties (hardness and elastic modulus). Capacitive-nanoindentation technique has shown to be an efficient tool for the local measurement of dielectric permittivity of thin films at low frequencies (2MHz). SEM integration allows the testing of small-scale objects, as well as the precise positioning of indentation tests on inhomogeneous materials (see image below).
mise à jour le 10 juin 2020