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Published on September 27, 2017
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Design of Experiments method: a fountain of Youth for CVD process.

CVD SIMaP (crédit F. Mercier)

CVD SIMaP (crédit F. Mercier)

We propose here to revisit a classical CVD process with a design of experiment approach to reveal that main parameters influencing the desired properties of an epitaxial layer, here AlN on sapphire, are not necessarily the one you expect. Simple DOE method can bring new insight into a well-established research and can make you go out of your intuition without any increase in experimental cost !



This work is published in Coatings and is enlighten in the front cover of 2017 September issue

Epitaxial Growth of AlN on (0001) Sapphire: Assessment of HVPE Process by a Design of Experiments Approach,
Raphaël Boichot, Danying Chen, Frédéric Mercier, Francis Baillet, Gaël Giusti, Thomas Coughlan, Mikhail Chubarov and Michel Pons,
Coatings 2017, 7(9), 136; doi: Coatings 2017, 7(9), 136; doi:10.3390/coatings7090136
 

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Written by Muriel Braccini

Date of update September 27, 2017

Communauté Université Grenoble Alpes
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